Overview of Parallel Plate Electrostatic Actuators
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Why MEMS Actuators Use Parallel Plate Models
HAXEL with both in-plane and out-of-plane motion. Shear and normal force from a single actuator
Electrostatic Actuation Proof of Concept
Electrostatics - Parallel Plates
Enhancing Open-Loop Control of MEMS Using Linear Electrostatic Levitation Actuators
How MEMS Move: The Secret of Electrostatic Force
HAXELs: Hydraulically Amplified Electrostatic Actuators for Wearable Haptics
Stabilization of a Parallel-Plate Microactuator via Control Lyapunov Functions